Nano-electromechanical Devices Robust Carbon-Nanotube-Based Nano-electromechanical Devices: Understanding and Eliminating Prevalent Failure Modes Using Alternative Electrode Materials
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چکیده
The International Technology Roadmap for Semiconductors (ITRS [ 1 ] ) identifi es emerging technologies with the potential to sustain Moore’s Law. A necessary succession from planar CMOS (complementary metal-oxide semiconductors) to nonplanar/dual-gate CMOS, and ultimately to novel architectures such as carbon nanotube (CNT)-based nano-electromechanical systems (NEMS) is envisioned. The ITRS also identifi es critical roadblocks currently precluding advances beyond CMOS. Primary among the roadblocks to NEMS are poor reliability and manufacturing challenges. Here we investigate the prevalent failure modes of CNT-based NEMS that hamper reliability through a combined experimental–computational approach. We fi rst identify their point of onset within the design space through in situ electromechanical characterization, highlighting the extremely limited region in which failure is avoided. We use dynamic multiphysics models to elucidate the underlying causes of failure, then return to the experimental characterization to show that the usable design space expands dramatically when employing novel electrode materials such as diamondlike carbon. Finally, we demonstrate the effi cacy of this solution through 100 successive actuation cycles without failure and applications to volatile memory operations. The immense potential of CNT-based NEMS is emergent in theoretical and experimental demonstrations of up to 100-GHz switching, [ 2 ] low leakage, and high ON–OFF ratios, [ 3 ] and outstanding current-carrying capacity. [ 4 , 5 ] To date however, individual demonstrations of performance such as these have been a primary focus, with limited reports of repeated actuation beyond a few cycles. [ 2 , 3 , 6 , 7 ] This is due
منابع مشابه
Robust carbon-nanotube-based nano-electromechanical devices: understanding and eliminating prevalent failure modes using alternative electrode materials.
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تاریخ انتشار 2010